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Presentation Title : Dry Etching of Copper Using Plasma - Auburn University

Presentation Summary : Dry Etching of Copper Using Plasma Kejun Xia Semiconductor TCAD Lab. Auburn University, AL Oct 19, 2003 Outline Background Introduction > Why Copper & low k for IC ...

Source : http://eng.auburn.edu/~tzengy/ELEC7730/ELEC%207730%20Fall%202003/Fall%202003%20Presentation%201/Xia-%20Dry%20Etching%20of%20Copper.ppt

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